TETRAKIS(DIETHYLAMINO)TITANIUM
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- $91 - $1580
- Product name: TETRAKIS(DIETHYLAMINO)TITANIUM
- CAS: 4419-47-0
- MF: C16H40N4Ti
- MW: 336.38
- EINECS:
- MDL Number:MFCD00015648
- Synonyms:TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
17 prices
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Brand
- ProChem
- Sigma-Aldrich
- Strem Chemicals
- Thermo Scientific Chemicals
Package
- 5G
- 5ml
- 10g
- 10gm
- 25g
- 50g
- 50gm
- ManufacturerProChem
- Product number3695
- Product descriptionTitanium(IV)Diethylamide 99.99%
- Packaging10gm
- Price$133
- Updated2021-12-16
- Buy
- ManufacturerProChem
- Product number3695
- Product descriptionTitanium (IV) Diethylamide 99.99%
- Packaging50gm
- Price$485
- Updated2021-12-16
- Buy
- ManufacturerSigma-Aldrich
- Product number469866
- Product descriptionTetrakis(diethylamido)titanium(IV) 99.999% trace metals basis
- Packaging25g
- Price$575
- Updated2023-01-07
- Buy
- ManufacturerSigma-Aldrich
- Product number725536
- Product descriptionTetrakis(diethylamido)titanium(IV) packaged for use in deposition systems
- Packaging10g
- Price$1580
- Updated2023-06-20
- Buy
- ManufacturerSigma-Aldrich
- Product number407399
- Product descriptionTetrakis(diethylamido)titanium(IV) technical grade
- Packaging5G
- Price$205
- Updated2023-06-20
- Buy
- ManufacturerSigma-Aldrich
- Product number8.14018
- Product descriptionTetrakis(diethylamino)titanium for synthesis
- Packaging5ml
- Price$306
- Updated2022-05-15
- Buy
- ManufacturerSigma-Aldrich
- Product number469866
- Product descriptionTetrakis(diethylamido)titanium(IV) 99.999% trace metals basis
- Packaging5g
- Price$318
- Updated2023-01-07
- Buy
- ManufacturerStrem Chemicals
- Product number22-1050
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%
- Packaging25g
- Price$360
- Updated2024-03-01
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- ManufacturerStrem Chemicals
- Product number22-1050
- Product descriptionTetrakis(diethylamino)titanium(IV), 99% 99%
- Packaging25g
- Price$368
- Updated2026-04-30
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- ManufacturerStrem Chemicals
- Product number22-1050
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%
- Packaging5g
- Price$91
- Updated2024-03-01
- Buy
- ManufacturerStrem Chemicals
- Product number22-1050
- Product descriptionTetrakis(diethylamino)titanium(IV), 99% 99%
- Packaging5g
- Price$93
- Updated2026-04-30
- Buy
- ManufacturerStrem Chemicals
- Product number98-4043
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
- Packaging10g
- Price$1179
- Updated2024-03-01
- Buy
- ManufacturerStrem Chemicals
- Product number98-4043
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok? cylinder (96-1070) for CVD/ALD 99%
- Packaging10g
- Price$1264
- Updated2026-04-30
- Buy
- ManufacturerStrem Chemicals
- Product number98-4043
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
- Packaging25g
- Price$1357
- Updated2024-03-01
- Buy
- ManufacturerStrem Chemicals
- Product number98-4043
- Product descriptionTetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok? cylinder (96-1070) for CVD/ALD 99%
- Packaging25g
- Price$1446
- Updated2026-04-30
- Buy
- ManufacturerThermo Scientific Chemicals
- Product number040469
- Product descriptionTetrakis(diethylamino)titanium(IV) 99.99% (metals basis)
- Packaging50g
- Price$641
- Updated2021-12-16
- Buy
| Manufacturer | Product number | Product description | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|
| ProChem | 3695 | Titanium(IV)Diethylamide 99.99% | 10gm | $133 | 2021-12-16 | Buy |
| ProChem | 3695 | Titanium (IV) Diethylamide 99.99% | 50gm | $485 | 2021-12-16 | Buy |
| Sigma-Aldrich | 469866 | Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 25g | $575 | 2023-01-07 | Buy |
| Sigma-Aldrich | 725536 | Tetrakis(diethylamido)titanium(IV) packaged for use in deposition systems | 10g | $1580 | 2023-06-20 | Buy |
| Sigma-Aldrich | 407399 | Tetrakis(diethylamido)titanium(IV) technical grade | 5G | $205 | 2023-06-20 | Buy |
| Sigma-Aldrich | 8.14018 | Tetrakis(diethylamino)titanium for synthesis | 5ml | $306 | 2022-05-15 | Buy |
| Sigma-Aldrich | 469866 | Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 5g | $318 | 2023-01-07 | Buy |
| Strem Chemicals | 22-1050 | Tetrakis(diethylamino)titanium(IV), 99% | 25g | $360 | 2024-03-01 | Buy |
| Strem Chemicals | 22-1050 | Tetrakis(diethylamino)titanium(IV), 99% 99% | 25g | $368 | 2026-04-30 | Buy |
| Strem Chemicals | 22-1050 | Tetrakis(diethylamino)titanium(IV), 99% | 5g | $91 | 2024-03-01 | Buy |
| Strem Chemicals | 22-1050 | Tetrakis(diethylamino)titanium(IV), 99% 99% | 5g | $93 | 2026-04-30 | Buy |
| Strem Chemicals | 98-4043 | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD | 10g | $1179 | 2024-03-01 | Buy |
| Strem Chemicals | 98-4043 | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok? cylinder (96-1070) for CVD/ALD 99% | 10g | $1264 | 2026-04-30 | Buy |
| Strem Chemicals | 98-4043 | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD | 25g | $1357 | 2024-03-01 | Buy |
| Strem Chemicals | 98-4043 | Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok? cylinder (96-1070) for CVD/ALD 99% | 25g | $1446 | 2026-04-30 | Buy |
| Thermo Scientific Chemicals | 040469 | Tetrakis(diethylamino)titanium(IV) 99.99% (metals basis) | 50g | $641 | 2021-12-16 | Buy |
Properties
Melting point :4 °C
Boiling point :112 °C0.1 mm Hg(lit.)
Density :0.931 g/mL at 25 °C(lit.)
refractive index :n20/D 1.536(lit.)
Flash point :-18 °F
storage temp. :Store at +2°C to +8°C.
solubility :Reacts with air.
form :liquid
color :yellow to orange
Specific Gravity :0.95
Hydrolytic Sensitivity :8: reacts rapidly with moisture, water, protic solvents
Sensitive :Moisture Sensitive
BRN :3621431
InChI :1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4
InChIKey :VJDVOZLYDLHLSM-UHFFFAOYSA-N
SMILES :CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC
CAS DataBase Reference :4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference :Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System :Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
Boiling point :112 °C0.1 mm Hg(lit.)
Density :0.931 g/mL at 25 °C(lit.)
refractive index :n
Flash point :-18 °F
storage temp. :Store at +2°C to +8°C.
solubility :Reacts with air.
form :liquid
color :yellow to orange
Specific Gravity :0.95
Hydrolytic Sensitivity :8: reacts rapidly with moisture, water, protic solvents
Sensitive :Moisture Sensitive
BRN :3621431
InChI :1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4
InChIKey :VJDVOZLYDLHLSM-UHFFFAOYSA-N
SMILES :CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC
CAS DataBase Reference :4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference :Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System :Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
Safety Information
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Description
Used as nitride precursor - MOCVD. Precursor to Titanium nitride (TiN) thin films, chemical vapor deposition (CVD). A novel templated non-hydrolytic sol-gel synthesis of titanosilicate xerogels is reported. Acetamide elimination from silicon acetate and titanium diethylamide allows obtaining titanosilicates with a high content of Si-O-Ti bonds but low surface areas. Metal-organic chemical vapor deposition (MOCVD) of TiN thin films at low temperatures and low pressures using tetrakis(diethylamino) Ti (TDEAT) and NH3 is described. TDEAT dissociatively chemisorbs on SiO2 at room temperature or above, resulting in Ti?N bond scission, and Ti?O bond formation.Related product price
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