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ChemicalBook >> CAS DataBase List >>Hexafluoroethane

Hexafluoroethane

CAS No.
76-16-4
Chemical Name:
Hexafluoroethane
Synonyms
C2F6;FC-116;r116;f116;R-116;R 116;F-116;PFC116;FC1160;CFC-116
CBNumber:
CB5123920
Molecular Formula:
C2F6
Lewis structure
c2f6 lewis structure
Molecular Weight:
138.01
MDL Number:
MFCD00000428
MOL File:
76-16-4.mol
MSDS File:
SDS
Last updated:2026-06-23 16:59:16
Product description Number Pack Size Price
Hexafluoroethane ≥98% 295361 227g $858
Perfluoroethane (FC-116) 99.9% PC7201 100g $781
Perfluoroethane (FC-116) 99.9% PC7201 250g $1120
Perfluoroethane (FC-116) 99.9% PC7201 100g $781
Perfluoroethane (FC-116) 99.9% PC7201 250g $1120
More product size

Hexafluoroethane Properties

Melting point −100 °C(lit.)
Boiling point −78 °C(lit.)
Density 1,607 g/cm3
vapor density 4.7 (vs air)
vapor pressure 430 psi ( 21 °C)
refractive index 1.2060
Specific Heat Capacity Cp(gas): 0.77 J/(g·K), at 25℃
Henry's Law Constant 6.5×10-7 mol/(m3Pa) at 25℃, Bonifácio et al. (2001)
InChI InChI=1S/C2F6/c3-1(4,5)2(6,7)8
InChIKey WMIYKQLTONQJES-UHFFFAOYSA-N
SMILES C(F)(F)(F)C(F)(F)F
CAS DataBase Reference 76-16-4(CAS DataBase Reference)
FDA UNII 7VL5Z0IY3A
EPA Substance Registry System Hexafluoroethane (76-16-4)

SAFETY

Risk and Safety Statements

Symbol(GHS)  Gas Cylinder (GHS04)
GHS04
Signal word  Warning
Hazard statements  H280
Precautionary statements  P410+P403
Hazard Codes  Xi
Safety Statements  38
RIDADR  UN 2193 (HEXAFLUOROETHANE (REFRIGERANT GAS R 116))
WGK Germany  3
RTECS  KI4110000
Hazard Note  Irritant
TSCA  TSCA listed
HazardClass  2.2
HS Code  2903392820
Hazardous Substances Data 76-16-4(Hazardous Substances Data)
REACH Registrations Active
NFPA 704
0
1 0

Hexafluoroethane price More Price(16)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 295361 Hexafluoroethane ≥98% 76-16-4 227g $858 2026-04-30 Buy
Apolloscientific PC7201 Perfluoroethane (FC-116) 99.9% 76-16-4 100g $781 2026-06-04 Buy
Apolloscientific PC7201 Perfluoroethane (FC-116) 99.9% 76-16-4 250g $1120 2026-06-04 Buy
Apolloscientific PC7201 Perfluoroethane (FC-116) 99.9% 76-16-4 100g $781 2026-06-04 Buy
Apolloscientific PC7201 Perfluoroethane (FC-116) 99.9% 76-16-4 250g $1120 2026-06-04 Buy
Product number Packaging Price Buy
295361 227g $858 Buy
PC7201 100g $781 Buy
PC7201 250g $1120 Buy
PC7201 100g $781 Buy
PC7201 250g $1120 Buy

Hexafluoroethane Chemical Properties,Uses,Production

Description

Hexafluoroethane is a colorless and oodorlessgas or liquid under pressure. Molecular weight = 138.02;Boiling point= -78℃. Hazard Identification (based onNFPA-704 M Rating System): Health 1, Flammability 0,Reactivity 0. Insoluble in water.

Chemical Properties

Hexafluoroethane is a colorless and odorless gas, or liquid under pressure. asphyxiant in high concentrations. Gas density is heavier than air. Hexafluoroethane is chemically inert and has a very high global warming potential (GWP = 11,100; Greenhouse gas protocol, Fifth Assessment Report AR5). It is an etchant and chamber cleaning agent.

Uses

Hexafluoroethane is used as an important component in some refrigeration mixtures, and as a reactive ion etching gas in semiconductor materials processing applications. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.
In semiconductor applications, for example in reactive ion etching, hexafluoroethane with a fluorine to carbon ratio of 3:1 offers a unique source of highly reactive trifluoromethyl radicals without accompanying hydrogen atoms.As a result, semiconductor material plasma etching processes employing hexafluoroethane are relatively aggressive with respect to fluorine radical formation.

Definition

ChEBI: Hexafluoroethane is a fluoroalkane and a fluorocarbon. It has a role as a refrigerant.

Synthesis Reference(s)

Journal of the American Chemical Society, 77, p. 3007, 1955 DOI: 10.1021/ja01616a025

General Description

HEXAFLUOROETHANE is a colorless, odorless gas. HEXAFLUOROETHANE is relatively inert. The mixture is nonflammable and nontoxic, though asphyxiation may occur because of displacement of oxygen. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.

Reactivity Profile

HEXAFLUOROETHANE is chemically inert in many situations, but can react violently with strong reducing agents such as the very active metals and the active metals. Can react with strong oxidizing agents or weaker oxidizing agents under extremes of temperature.

Health Hazard

Vapors may cause dizziness or asphyxiation without warning. Vapors from liquefied gas are initially heavier than air and spread along ground. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating, corrosive and/or toxic gases.

Fire Hazard

Some may burn but none ignite readily. Containers may explode when heated. Ruptured cylinders may rocket.

Synthesis

Fluorine gas or a mixture of nitrogen and fluorine gas and tetrafluoroethylene enter into a reactor at a temperature of l0-60C and a pressure of 0.1-0.15 MPa from different inlet ports, and the air velocity of the gas in the reactor is controlled to be 0.2-10 min to carry out the reaction, and a part of the reaction product obtained is circulated at the outlet end of the reactor through a centrifugal fan of an external circulating device of the reactor and returned to the inlet end of the reactor, and mixed with hexafluoroethane which comes in through the inlet port, and then enters into the reactor after being mixed with The fluorine gas or a mixture of nitrogen and fluorine gas as well as tetrafluoroethylene coming in through the inlet port is mixed and then entered into the reactor, and the reaction is circulated; the other part of the reaction product obtained comes out directly from the outlet port, and said hexafluoroethane is obtained. The method described in the invention has a simple process, mild reaction conditions, inexpensive reactor, high content of hexafluoroethane prepared, low impurity content and high yield.

Potential Exposure

It is used as a coolant, in dielectric fluids; as a propellant and refrigerant.

First aid

If this chemical gets into the eyes, remove anycontact lenses at once and irri gate immediately for at least15 min, occasionally lifting upper and lower lids. Seek med-ical attention immediately. If this chemical contacts theskin, remove contaminated clothingand wash immediatelywith soap and water. Seek medical attention immediately. Ifthis chemical has been inhaled, remove from exposure,begin rescue breathing (using universal precautions, includ-ing resuscitation mask) if breathing has stopped and CPR ifheart action has stopped. Transfer promptly to a medicalfacility. When this chemical has been swallowed, get medi-cal attention. Give large quantities of water and inducevomiting. Do not make an unconscious person vomit. Iffrostbite has occured, seek medical attention immediately;do NOT rub the affected areas or flush them with water. Inorder to prevent further tissue damage, do NOT attempt toremove frozen clothing from frostbitten areas. If frostbitehasNOT occurred, immediately and thoroughly washcontaminated skin with soap and water.

storage

Color Code- Green: General storage may be used.Prior to working with this chemical you should be trainedon its proper handling and storage. Store in tightly closedcontainers in a cool, well-venti lated area away from metals,including aluminum, zinc, and beryllium, and from openflames or temperatures above 52℃. Procedures for thehandling, use, and storage of cylinders should be in compli-ance with OSHA 1910.101 and 1910.169, as with therecommendations of the Compressed Gas Association.

Shipping

UN2193 Hexafluoroethane or Refrigerant gas R-116, Hazard Class: 2.2; Labels: 2.2-Nonflammable compressed gas.

Purification Methods

Purify it for pyrolysis studies by passing through a copper vessel containing CoF3 at ca 270o, and hold for 3hours in a bottle with a heated (1300o) platinum wire. It is then fractionally distilled. [Steunenberg & Cady J Am Chem Soc 74 4165 1962, Beilstein 1 IV 132.]

Incompatibilities

Active metals. Keep away from heat and sunlight.

Waste Disposal

Return refillable compressed gas cylinders to supplier.

354-33-6
76-16-4
Synthesis of Hexafluoroethane from Pentafluoroethane
Global( 92)Suppliers
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View Lastest Price from Hexafluoroethane manufacturers

Image Update time Product Price Min. Order Purity Supply Ability Manufacturer
HEXAFLUOROETHANE pictures 2019-07-06 HEXAFLUOROETHANE
76-16-4
$1.00 1 g 99% 100KG Career Henan Chemical Co
freon116 Hexafluorethan hexafluoro-ethan Perfluorocarbon116 PFC116 R 116 r116 R-116 PERFLUOROETHANE CFC-116 HALOCARBON 116 HEXAFLUOROETHANE FC-116~Perfluoroethane Hexafluoroethane (FC-116) Hexafluoroethane (FC-116) 99 Hexafluoroethene Hexafluoroethane (FC-116) 99.99% HEXAFLUORETHANE HEXAFLUOROETHANE: 99.9% CFC-116, Perfluoroethane Fron-116 Perfluroethane Perfluoroethane (FC-116) 99% Perfluoroethane (FC-116) 99.9% Perfluoroethane(FC-116)99% 1,1,1,2,2,2-Hexafluoroethane ethane,hexafluoro- Ethylhexafluoride f116 F-116 FC1160 Fluorocarbon 116 Freon 116 Freon 1166SY Hexafluoroethane(R116) Ethane, 1,1,1,2,2,2-hexafluoro- Perfluorethan HEXAFLUOROETHANE ISO 9001:2015 REACH Six fluorine ethane C2F6 FC-116 76-16-4 76164 CF3CF3 Synthetic Reagents Compressed and Liquefied Gases refrigerants Organics
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